Facilities
Equipment
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Hot Plate
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Vacuum Pump Station
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ARS Closed Cycle Cryostat (4.6 K to 420 K)
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GMW Model-5403 Electromagnet (1T)
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Low temperature measuring system
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SR 830 Lock In Amplifier
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Lakeshore 335 Temperature Controller
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Keithley 2000/2400/2450 Source Meter
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Nikon Optical Microscope combined ARMS photo lithography.
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Room temperature probe station
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TR15C Spin Coater
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Nanoview1000 AFM/MFM
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ULVAC Metal Evaporation Machine
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SMH Golden Wire Bonding Machine
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KingLab Chemical Hood
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Reactive-Ion plasma Etching for Ar, O2, CF4
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ULVAC Thermal Rapid Annealing system:MILA-3000 with Ar, O2, H2
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Hitachi S3000N Scanning Electron Microscope (SEM)
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UniDRON Micro Raman / PL Spectroscopy and mapping
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Low-Temperature Electrical and Optical Measurement System
Nikon Optical Microscope combined ARMS photo lithography
Room temperature probe station
TR15C Spin Coater
ULVAC Metal Evaporation Machine
Nanoview1000 AFM/MFM
SMH Golden Wire Bonding Machine
KingLab Chemical Hood
ULVAC Thermal Rapid Annealing system : MILA-3000 with Ar, O2, H2
UniDRON Micro Raman / PL Spectroscopy and mapping
Reactive-Ion plasma Etching for Ar, O2, CF4
Hitachi S3000N Scanning Electron Microscope (SEM)
液態氮循環機
溫度控制器
電性量測載台
液態氮桶
Low-Temperature Electrical and Optical Measurement System